%0 Journal Article
%T Analysis of Low-Temperature Plasma by Optical Emission Spectroscopy with Spatial Scanning
%A Ismagilov, R. R.
%A Loginov, A. B.
%A Malykhin, S. A.
%A Kleshch, V. I.
%A Obraztsov, A. N.
%J Instruments and Experimental Techniques
%V 64
%N 5
%P 700-704
%@ 0020-4412
%D 2021-09-01
%I Pleiades Publishing
%~ DeepDyve