%0 Journal Article
%T Micro-opto-electro-mechanical systems alignment stages with Vernier latch mechanisms
%A Syms, R R A
%A Zou, H
%A Stagg, J
%J Journal of Optics A: Pure and Applied Optics
%V 8
%N 7
%@ 1464-4258
%D 2006-07-01
%~ DeepDyve