%0 Journal Article
%T Nano-spring arrays for high-density interconnect
%A Fork, David K.
%A Haemer, Joe
%A Smith, Donald L.
%J Proceedings of SPIE
%V 4176
%N 1
%P 226-235
%@ 0277-786X
%D 2000-08-15
%I SPIE
%~ DeepDyve