%0 Journal Article
%T Simulation, fabrication, and dynamics characteristics of electrostatically actuated switches
%A Postnikov, A. V.
%A Kalnov, V. A.
%J Proceedings of SPIE
%V 7025
%N 1
%P 70251H-70251H-8
%@ 0277-786X
%D 2008-03-03
%I SPIE
%~ DeepDyve