%0 Journal Article
%T Design and simulation analysis of diaphragm pressure sensor
%A Li, Guiyuan
%A Wang, Zhao
%A Qu, Wei
%A Yuan, Renshu
%A Yang, Jianmin
%J Proceedings of SPIE
%V 13251
%P 1325102-1325102-6
%@ 0277-786X
%D 2024-08-28
%I SPIE
%~ DeepDyve