%0 Journal Article
%T Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch
%A Jia, Shuhai
%A Peng, Jun
%A Bian, Jiaming
%A Zhang, Shuo
%A Xu, Shunjian
%A Zhang, Bao
%J Micromachines
%V 12
%N 2
%@ 2072-666X
%D 2021-02-22
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve