%0 Journal Article
%T Resistively actuated micromechanical dome resonators
%A Reichenbach, Robert B.
%A Houston, Brian H.
%A Craighead, Harold G.
%J Proceedings of SPIE
%V 5344
%N 1
%P 51-58
%@ 0277-786X
%D 2004-01-24
%I SPIE
%~ DeepDyve