%0 Journal Article
%T Improvement of power, efficiency, and cost of ownership in the tin LPP EUV source
%A McGeoch, Malcolm W.
%J Proceedings of SPIE
%V 10143
%P 101432K-101432K-6
%@ 0277-786X
%D 2017-03-24
%I SPIE
%~ DeepDyve