%0 Journal Article %T Experimental study on lapping of micro groove with controlled force %A Ding, Fei %A Wang, Bo %A Li, Guo %A Che, Lin %A Mao, Xing %J Proceedings of SPIE %V 9283 %P 92830O-92830O-8 %@ 0277-786X %D 2014-08-21 %I SPIE %~ DeepDyve