%0 Journal Article
%T Fabrication of 4H-SiC n-channel IGBTs with ultra high blocking voltage
%A Yang, Xiaolei
%A Tao, Yonghong
%A Yang, Tongtong
%A Huang, Runhua
%A Song, Bai
%J Journal of Semiconductors
%V 39
%N 3
%P 3
%@ 1674-4926
%D 2018-03-01
%~ DeepDyve