%0 Journal Article
%T Electron-beam direct writing technology for fine gate patterning
%A Sato, Kazuhiko
%A Shirai, Seiichiro
%A Hayakawa, Hajime
%J Proceedings of SPIE
%V 3331
%N 1
%P 326-333
%@ 0277-786X
%D 1998-06-05
%I SPIE
%~ DeepDyve