%0 Journal Article
%T Monolithic 3D integration of back-end compatible 2D material FET on Si FinFET
%A Guan, Shi-Xian
%A Yang, Tilo H.
%A Yang, Chih-Hao
%A Hong, Chuan-Jie
%A Liang, Bor-Wei
%A Simbulan, Kristan Bryan
%A Chen, Jyun-Hong
%A Su, Chun-Jung
%A Li, Kai-Shin
%A Zhong, Yuan-Liang
%A Li, Lain-Jong
%A Lan, Yann-Wen
%J npj 2D Materials and Applications
%V 7
%N 1
%D 2023-02-07
%I Nature Publishing Group UK
%~ DeepDyve