%0 Journal Article
%T Optical characterization methods of InP-based micro-opto-electro-mechanical systems
%A Le Dantec, Ronan
%A Seassal, Christian
%A Benferhat, Ramdane
%A Rondi, D.
%J Proceedings of SPIE
%V 3008
%N 1
%P 258-264
%@ 0277-786X
%D 1997-04-11
%I SPIE
%~ DeepDyve