%0 Journal Article
%T Influence of the failure effect of MEMS capacitive high g acceleration sensor on the limit range and sensitivity
%A Liu, Yong
%A Li, Changsheng
%A He, Guanhua
%J Journal of Physics: Conference Series
%V 1635
%N 1
%P 8
%@ 1742-6588
%D 2020-12-05
%~ DeepDyve