%0 Journal Article %T A new approach to microfabrication and synthesization using synchrotron radiation excited chemical reaction %A Utsumi, Y. %A Hattori, T. %J Microsystem Technologies %V 9 %N 5 %P 316-318 %@ 0946-7076 %D 2003-05-01 %I Springer-Verlag %~ DeepDyve