%0 Journal Article
%T Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing
%A Kashani Ilkhechi, Afshin
%A Martell, Matthew
%A Zemp, Roger
%J Micromachines
%V 14
%N 1
%@ 2072-666X
%D 2022-12-24
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve