%0 Journal Article
%T NDE applications in microelectronic industries
%A Meyendorf, N.
%A Oppermann, M.
%A Krueger, P.
%A Roellig, M.
%A Wolter, K. J.
%J Proceedings of SPIE
%V 9806
%P 98060V-98060V-9
%@ 0277-786X
%D 2016-04-01
%I SPIE
%~ DeepDyve