%0 Journal Article
%T Interbay Automated Material Handling System stocker design for wafer fabrication facilities
%A Lin, Chiahung J. 
%A Yang, Taho
%A Padillo, Jose M.
%A Beres, Debbie
%J International Journal of Manufacturing Technology and Management
%V 1
%N 2
%P 147-155
%@ 1368-2148
%D 2000-01-01
%I Inderscience Publishers
%~ DeepDyve