%0 Journal Article
%T Multilayer optics and applications in EUV and x-ray region
%A Zhu, Jingtao
%A Huang, Qiushi
%A Li, Haochuan
%A Tu, Yuchun
%A Song, Zhuqing
%A Pan, Lei
%A Jiang, Li
%A Wang, Xiaoqiang
%A Wang, Fengli
%A Zhang, Zhong
%A Wang, Zhanshan
%A Chen, Lingyan
%J Proceedings of SPIE
%V 7995
%N 1
%P 79952R-79952R-6
%@ 0277-786X
%D 2010-10-11
%I SPIE
%~ DeepDyve