%0 Journal Article %T Multilayer optics and applications in EUV and x-ray region %A Zhu, Jingtao %A Huang, Qiushi %A Li, Haochuan %A Tu, Yuchun %A Song, Zhuqing %A Pan, Lei %A Jiang, Li %A Wang, Xiaoqiang %A Wang, Fengli %A Zhang, Zhong %A Wang, Zhanshan %A Chen, Lingyan %J Proceedings of SPIE %V 7995 %N 1 %P 79952R-79952R-6 %@ 0277-786X %D 2010-10-11 %I SPIE %~ DeepDyve