%0 Journal Article %T Research of beam control system component simulation and separation method of the kinematics coupling %A Yue, Yufang %A Xie, Xiaogang %A Zhang, Jianzhu %A An, Jianzhu %A Zhang, Feizhou %J Proceedings of SPIE %V 9255 %P 92551M-92551M-10 %@ 0277-786X %D 2015-02-03 %I SPIE %~ DeepDyve