%0 Journal Article
%T Process of Au-Free Source/Drain Ohmic Contact to AlGaN/GaN HEMT
%A Zhang, Lin-Qing
%A Wu, Xiao-Li
%A Miao, Wan-Qing
%A Wu, Zhi-Yan
%A Xing, Qian
%A Wang, Peng-Fei
%J Crystals
%V 12
%N 6
%@ 2073-4352
%D 2022-06-10
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve