%0 Journal Article
%T New metrology stage for ion projection lithography made of glass ceramics
%A Risse, Stefan
%A Kirschstein, Ulf Carsten
%J Proceedings of SPIE
%V 3786
%N 1
%P 330-338
%@ 0277-786X
%D 1999-09-28
%I SPIE
%~ DeepDyve