%0 Journal Article
%T Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source
%A Ishida, Kazumasa
%A Ozaki, Nobuhiko
%A Ohsato, Hirotaka
%A Watanabe, Eiichiro
%A Ikeda, Naoki
%A Sugimoto, Yoshimasa
%J Japanese Journal of Applied Physics
%V 57
%N 8S2
%P 5
%@ 0021-4922
%D 2018-08-01
%~ DeepDyve