%0 Journal Article
%T Radiation-Induced Charge Trapping in Shallow Trench Isolations of FinFETs
%A Bonaldo, Stefano
%A Wallance, Trace
%A Barnaby, Hugh
%A Borghello, Giulio
%A Termo, Gennaro
%A Faccio, Federico
%A Fleetwood, Daniel M.
%A Mattiazzo, Serena
%A Bagatin, Marta
%A Paccagnella, Alessandro
%A Gerardin, Simone
%A ,
%J IEEE Transactions on Nuclear Science
%@ 0018-9499
%D 2023-01-01
%I Institute of Electrical and Electronics Engineers (IEEE)
%~ DeepDyve