%0 Journal Article
%T Influence of a chip scale package on the frequency response of a MEMS microphone
%A Winter, Matthias
%A Feiertag, Gregor
%A Leidl, Anton
%A Seidel, Helmut
%J Microsystem Technologies
%V 16
%N 5
%P 809-815
%@ 0946-7076
%D 2009-12-25
%I Springer-Verlag
%~ DeepDyve