%0 Journal Article
%T Analysis of N-channel transistor punch-through related to STI process
%A Zhang, Yunqiang
%A Vigar, David
%A Sundaresan, Ravi
%J Proceedings of SPIE
%V 4227
%N 1
%P 72-78
%@ 0277-786X
%D 2000-10-24
%I SPIE
%~ DeepDyve