%0 Journal Article
%T Fabrication of sub-20 nm nanostructures by combination of nano plastic forming and etching (NPFE)
%A Rashidi, Hassan
%A Yoshino, Masahiko
%J Journal of Micromechanics and Microengineering
%V 20
%N 9
%P 10
%@ 0960-1317
%D 2010-09-01
%~ DeepDyve