%0 Journal Article
%T 3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer
%A Park, Jong-Yeon
%A Kim, Kun-Tae
%A Shin, Hyun-Joon
%A Moon, Sung
%A Pak, James Jungho
%J Microsystem Technologies
%V 11
%N 3
%P 168-178
%@ 0946-7076
%D 2004-01-01
%I Springer-Verlag
%~ DeepDyve