%0 Journal Article
%T Current imprint template commercial manufacturing capability for nanotechnology and existing semiconductor and MEMS markets
%A Maltabes, John G.
%J Proceedings of SPIE
%V 5931
%N 1
%P 59311H-59311H-5
%@ 0277-786X
%D 2005-08-18
%I SPIE
%~ DeepDyve