%0 Journal Article
%T Search for Barrier Materials for Cu Interconnects in Integrated Circuits
%A Sasajima, Yasushi
%A Kimura, Yuki
%A Tsumuraya, Tetsunori
%A Nagano, Takatoshi
%A Onuki, Jin
%J ECS Journal of Solid State Science and Technology
%V 2
%N 9
%@ 2162-8769
%D 2013-01-01
%~ DeepDyve