%0 Journal Article
%T Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding
%A Thuau, Damien
%A Laval, Cédric
%A Dufour, Isabelle
%A Poulin, Philippe
%A Ayela, Cédric
%A Salmon, Jean-Baptiste
%J Microsystems & Nanoengineering
%V 4
%N 1
%P 1-8
%D 2018-07-02
%I Nature Publishing Group UK
%~ DeepDyve