%0 Journal Article
%T Multi-axis heterodyne interferometric for simultaneous observation of 5 degrees of freedom using a single beam
%A Perea, James
%A Libbey, Brad
%A Nehmetallah, George
%J Proceedings of SPIE
%V 10991
%P 109910N-109910N-12
%@ 0277-786X
%D 2019-05-13
%I SPIE
%~ DeepDyve