%0 Journal Article
%T Development of scanning capacitance force microscopy using the dissipative force modulation method
%A Uruma, Takeshi
%A Satoh, Nobuo
%A Yamamoto, Hidekazu
%A Iwata, Futoshi
%J Measurement Science and Technology
%V 31
%N 3
%P 9
%@ 0957-0233
%D 2020-03-01
%~ DeepDyve