%0 Journal Article
%T 3D optical micro-resonators by curving nanostructures using intrinsic stress
%A Sieutat, C.
%A Chevalier, C.
%A Danescu, A.
%A Grenet, G.
%A Regreny, P.
%A Viktorovitch, P.
%A Letartre, X.
%A Leclercq, J. L.
%J Proceedings of SPIE
%V 8425
%N 1
%P 842519-842519-9
%@ 0277-786X
%D 2012-04-16
%I SPIE
%~ DeepDyve