%0 Journal Article
%T An innovative methodology for monitoring the sacrificial layer removal process in MEMS structures
%A Barati, Hamed
%A Barazandeh, Farshad
%A Jabari, Alireza
%A Akbari, Mohammad
%J Physica Scripta
%V 99
%N 3
%P 16
%@ 0031-8949
%D 2024-03-01
%I IOP Publishing
%~ DeepDyve