%0 Journal Article
%T Ultra-Precise Mask Metrology - Development And Practical Results Of A New Measuring Machine
%A Feindt, H.
%A Sofronijevic, D.
%J Proceedings of SPIE
%V 1138
%P 151-157
%@ 0277-786X
%D 1989-01-11
%I SPIE
%~ DeepDyve