%0 Journal Article
%T Application and experimental verification of phase-shift approach with rectangular-wave illumination for defect-inspection apparatus
%A Onishi, Yoshito
%A Seo, Yoshiho
%A Matsuoka, Masaoki
%A Serikawa, Shigeru
%A Tsugane, Ken
%J Proceedings of SPIE
%V 12231
%P 122310C-122310C-6
%@ 0277-786X
%D 2022-09-30
%I SPIE
%~ DeepDyve