%0 Journal Article %T Development of a piezoelectric pump with ball valve structure %A Pan, Qiaosheng %A Jiang, Haiyang %A Huang, Ziliang %A Huang, Bin %A Li, Ruijun %A Wang, Biao %A Feng, Zhihua %J Journal of Intelligent Material Systems and Structures %V 32 %N 18-19 %P 2289-2299 %@ 1045-389X %D 2021-11-01 %I SAGE Publications %~ DeepDyve