%0 Journal Article
%T Plasma etched surface scanning inspection recipe creation based on bidirectional reflectance distribution function and polystyrene latex spheres
%A Saldana, Tiffany
%A McGarvey, Steve
%A Ayres, Steve
%J Proceedings of SPIE
%V 9050
%P 905038-905038-9
%@ 0277-786X
%D 2014-04-14
%I SPIE
%~ DeepDyve