%0 Journal Article
%T A Dual-function leak detector for MEMS devices
%A Jin, Yufeng
%A Wang, Zhiping
%A Miao, Min
%A Shan, X. C.
%J Proceedings of SPIE
%V 4980
%N 1
%P 301-308
%@ 0277-786X
%D 2003-01-25
%I SPIE
%~ DeepDyve