%0 Journal Article
%T RIE texturing optimization for thin c-Si solar cells in SF6/O2 plasma
%A Yoo, J
%A Kim, Kyunghae
%A Thamilselvan, M
%A Lakshminarayn, N
%A Kim, Young Kuk
%A Lee, Jaehyeong
%A Yoo, Kwon Jong
%A Yi, Junsin
%J Journal of Physics D: Applied Physics
%V 41
%N 12
%P 7
%@ 0022-3727
%D 2008-06-21
%~ DeepDyve