%0 Journal Article
%T Dissolution behavior of negative-type photoresists for display manufacture studied by quartz crystal microbalance method
%A Tsuneishi, Asuka
%A Uchiyama, Sachiyo
%A Kozawa, Takahiro
%J Japanese Journal of Applied Physics
%V 57
%N 4
%P 6
%@ 0021-4922
%D 2018-04-01
%~ DeepDyve