%0 Journal Article
%T A review of nanoimprint lithography for high-volume semiconductor device manufacturing
%A Resnick, Douglas J.
%A Choi, Jin
%J Advanced Optical Technologies
%V 6
%N 3-4
%P 229-241
%@ 2192-8584
%D 2017-06-27
%I De Gruyter
%~ DeepDyve