%0 Journal Article
%T Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners
%A Ebihara, Takeaki
%A Levenson, Marc D.
%A Liu, Wei
%A Oga, Toshihiro
%A Shen, Meihua
%J Proceedings of SPIE
%V 5256
%N 1
%P 985-994
%@ 0277-786X
%D 2003-12-15
%I SPIE
%~ DeepDyve