%0 Journal Article
%T Influence of substrate temperature and N 2 /Ar flow ratio on the stoichiometry, structure and hardness of TaNx coatings deposited by DC reactive sputtering
%A Valdez, K.
%A Espinosa‐Arbeláez, D. G.
%A García‐Herrera, J. E.
%A Muñoz‐Saldaña, J.
%A Farias, M. H.
%A De la Cruz, W.
%J Surface and Interface Analysis
%V 47
%N 11
%P 1015-1019
%@ 0142-2421
%D 2015-11-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve