%0 Journal Article
%T Positioning control system of three-dimensional wafer stage of lithography
%A Tian, Peng
%A Yan, Wei
%A Yang, Fan
%A Li, Fanxing
%A Hu, Song
%J Proceedings of SPIE
%V 9685
%P 96850T-96850T-6
%@ 0277-786X
%D 2016-10-25
%I SPIE
%~ DeepDyve