%0 Journal Article %T Measuring the diameter of electron beam by rotating slit disc %A Tongov, M %A Hikov, T %A Angelov, I %A Petrov, P %J IOP Conference Series: Materials Science and Engineering %V 878 %N 1 %P 5 %@ 1757-8981 %D 2020-06-01 %~ DeepDyve