%0 Journal Article %T A Comprehensive Review on FinFET in Terms of its Device Structure and Performance Matrices %A Reddy, M. Nomitha %A Panda, Deepak Kumar %J Silicon %V 14 %N 18 %P 12015-12030 %@ 1876-990X %D 2022-12-01 %I Springer Netherlands %~ DeepDyve