%0 Journal Article
%T Annealing Effect of Pb(Zr, Ti)O3 Ferroelectric Capacitor in Active Ammonia Gas   Cracked by Catalytic Chemical Vapor Deposition System
%A Minamikawa, Toshiharu
%A Yonezawa, Yasuto
%A Nakamura, Takashi
%A Fujimori, Yoshikazu
%A Masuda, Atsushi
%A Matsumura, Hideki
%J Japanese Journal of Applied Physics
%V 38
%N 9S
%@ 0021-4922
%D 1999-09-01
%~ DeepDyve