%0 Journal Article %T Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection %A Grand, Gilles %A Darboux, Michel %A Moisan, frederic %J Proceedings of SPIE %V 1010 %P 179-185 %@ 0277-786X %D 1989-02-15 %I SPIE %~ DeepDyve