%0 Journal Article
%T Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection
%A Grand, Gilles
%A Darboux, Michel
%A Moisan, frederic
%J Proceedings of SPIE
%V 1010
%P 179-185
%@ 0277-786X
%D 1989-02-15
%I SPIE
%~ DeepDyve